XRR is acutely sensitive to exact layer thickness, density gradients, and interfaces due to its selective detection of electron density changes perpendicular to a thin film surface. This makes it a powerful tool for characterization of films grown on wafers, both during and after the film formation process. XRR is often used in combination with X-ray Diffraction (XRD) for layer characterization; however, between the two: XRR provides increased flexibility for accurate analysis of both crystalline and amorphous layers.

Approaches for the software-based modeling done to extract the XRR results are as important as the instrument setup during measurement. Effective post-processing can make the difference between accurate insights, or misleading results that can obstruct effective characterization. Dr. Colleen Frazer will be discussing XRR from measurement setup to data processing and modeling: she will give you the thinking tools you need to avoid pitfalls and maximize your project’s success.